| Shaft diameter |
Φ4 |
Φ5 |
Φ6 |
Φ4 |
Φ5 |
Φ6 |
| Torque capacity (Kg·cm) |
5.8 |
6.4 |
6.4 |
5.8 |
6.4 |
6.4 |
| Vacuum pressure (Pa) |
10-6 |
| Helium leakage rate(Pa·m3/sec) |
<10-12 |
| Differential pressure(kg/cm2 ) |
2 |
2 |
| Gas compatibility |
Inert gas |
| Temperature |
0~80℃
(using water cooling in case of high temperature and high speed) |
| VAC side bearing |
686 |
686 |
686 |
686 |
686 |
686 |
| ATM side bearing |
686 |
686 |
686 |
686 |
686 |
686 |
| Bearing material |
SUS440C |
| Housing/shaft material |
SUS304/SUS630 |