| Shaft diameter |
Φ6 |
Φ10 |
Φ12 |
Φ20 |
| Torque capacity (Kg·cm) |
9.7 |
62 |
124 |
615 |
| Vacuum pressure (Pa) |
10-6 |
| Helium leakage rate(Pa·m3/sec) |
<10-12 |
| Differential pressure(kg/cm2 ) |
3 |
| Temperature (℃) |
0-80℃
(using water cooling in case of high temperature and high speed) |
| Gas compatibility |
Inert gas |
| VAC side bearing |
627 |
6001 |
6002 |
6005 |
| ATM side bearing |
627 |
6001 |
6002 |
6005 |
| Bearing material |
SUS440C |
| Housing/shaft material |
SUS304/SUS630 |
