| Shaft diameter |
Φ20 |
Φ25 |
Φ30 |
Φ40 |
Φ50 |
| Torque capacity (Kg·cm) |
616 |
1066 |
1706 |
3413 |
6106 |
| Vacuum pressure (Pa) |
10-5 |
| Helium leakage rate(Pa·m3/sec) |
<10-12 |
| Differential pressure(kg/cm2 ) |
3 |
| Temperature (℃) |
0-80℃
(using water cooling in case of high temperature and high speed) |
| Gas compatibility |
Inert gas |
| VAC side bearing |
7206CDF |
7207CDF |
7208CDF |
7210CDF |
7212CDF |
| ATM side bearing |
6205 |
6206 |
6207 |
6009 |
6211 |
| Bearing material |
SUJ2 |
| Housing/shaft material |
SUS303/SUS630 |
